Method and apparatus for inspecting insulating member

絶縁性部材の検査方法及び検査装置

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and apparatus for inspecting an insulating member for accurately and easily detecting whether extremely fine pin holes, cracks, or the like are present in the insulating member even if they are present. <P>SOLUTION: The method includes a step for bringing the first surface of the insulating member 20 into contact with one of a pair of electrodes; a step for supplying an electrolyte to a surface at a side opposite to a first surface in contact with the electrode; a step for bringing the other of the pair of electrodes into contact with the surface where the electrolyte is supplied; a step for applying voltage to the pair of electrodes in contact with the insulating member 20; and a step for determining the presence or absence of abnormality in the insulating member according to a current value when applying the voltage. <P>COPYRIGHT: (C)2007,JPO&INPIT
【課題】 絶縁性部材に、非常に微細なピンホールや亀裂等が存在していたとしても、これらが存在しているか否かを正確に、しかも簡単に検知することが可能な絶縁性部材の検査方法及び検査装置を提供する。 【解決手段】 一対の電極の一方に、絶縁性部材20の第1の表面を接触させる工程と、前記電極に接触させた第1の表面の反対側の面に電解液を供給する工程と、前記電解液が供給された面に、前記一対の電極の他方を接触させる工程と、絶縁性部材20に接触させた一対の電極に電圧を印加する工程と、前記電圧が印加された際の電流値に応じて、前記絶縁性部材の異常の有無を判定する工程を含んでなる絶縁性部材の検査方法である。 【選択図】 図3

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